| 品牌：Osaka | 压力(Mpa)：1 | 原理：齿轮泵 |
| 叶轮吸入方式：Osaka | 叶轮数目：1 | 叶轮结构：1 |
| 工作压力：1 | 性能：其他 | 扬程：1m |
| 材质：玻璃 | 泵轴位置：卧式 | 流量(m3/h)：1 |
| 用途：管道泵、 其他 | 适用范围：1 | 驱动方式：Osaka |
日本大阪Osaka真空泵TG220F系列报价,特点任何方向，尺寸紧凑，节能，快速启动，快速关闭气孔。空气浪涌测试。串行通信。符合国际公认的安全标准NRTL/SEMI-S2/CE
Inlet flange | VG100CF100ISO-R100 |
Volume flow rate (L/s) N2 | 220 |
(with protective screen) N2 | 210 |
H2 | 100 |
Max. compression ratio N2 | 1x108 |
H2 | 4x102 |
Ultimate pressure (Pa) | <1<>x10-6<1<> |
(Torr) | <7.5<>x10-9<7.5<> |
Max. throughput*1(sccm) N2 | 400 |
Startup time (min) | 1-1.2 |
Shutdown time (min) | 2.5-3.5 |
Max. backing pressure (Pa/Torr) | 260/2 |
Recommended backing vacuum pump (L/min) | ≧80 |
Position | Any orientation |
Weight (kg) VG, ISO-R/CF | 5.5/8 |
Controller | TC223/TC222*2 |
*1 : When using a backing vacuum pump of 160L/min.
*2 : Compact built in type.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
